SHUWA is a developer and manufacturer of semiconductor wafer polishing
and grinding equipment.(Si, SiC,GaN, InP, Ga2O3, AlN etc)
High-precision grinding is possible using high-rigidity spindle technology that we have cultivated over many years.
We have a lineup that pursues surface accuracy and flatness, from lapping to polishing to CMP.
The mounter attaches the wafer to the support substrate with precision, and the demounter peels off the wafer from the support substrate, even if the wafer is thinner than 100μm.
It has been used to lap ceramics, cemented carbide metals, etc. with high precision and efficiency. We can manufacture original diamond slurry according to customer requests.
We can offer consumables related to grinding and polishing, such as diamond slurry and diamond girinding wheel.
We perform contract processing of grinding and polishing of various wafers using our own equipment.